One-step maskless grayscale lithography for the fabrication...

Sensors and Actuators B: Chemical 2011 Vol. 153; Iss. 1

One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8

Amritha Rammohan, Prabhat K. Dwivedi, Rodrigo Martinez-Duarte, Hari Katepalli, Marc J. Madou, Ashutosh Sharma
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Volume:
153
Year:
2011
Language:
english
Pages:
10
DOI:
10.1016/j.snb.2010.10.021
File:
PDF, 1.72 MB
english, 2011
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