Very High Growth Rate Epitaxy Processes with Chlorine...

Materials Science Forum 2007 Vol. 556-557

Very High Growth Rate Epitaxy Processes with Chlorine Addition

La Via, Francesco, Leone, Stefano, Mauceri, Marco, Pistone, Giuseppe, Condorelli, G., Abbondanza, Giuseppe, Portuese, F., Galvagno, G., Di Franco, Salvatore, Calcagno, Lucia, Foti, Gaetano, Valente, G
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Volume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.556-557.157
File:
PDF, 274 KB
english, 2007
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