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Intra-Grain Defects - Limiting Factor for Low-Temperature Polycrystalline Silicon Films?
Wagner, Thomas A., Oberbeck, L., Bergmann, R.B., Werner, JensVolume:
80-81
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.80-81.95
File:
PDF, 468 KB
2001