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Correlation of Phase Segregation and Electrical Properties of Low-Power MOSFETs with Hf-based Silicate Gate Dielectric Layers and TaN Metal Gates
Petry, Jasmine, Rittersma, Chris, Vellianitis, Georgios, Cosnier, Vincent, Conard, Thierry, Deweerd, Wim, Van Berkum, Jan G.M.Volume:
917
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0917-E07-04
Date:
January, 2006
File:
PDF, 1.65 MB
english, 2006