Mechanical Stress Sensors for Copper Damascene...

MRS Proceedings 2007 / 1 Vol. 1052

Mechanical Stress Sensors for Copper Damascene Interconnects

Delamare, Romain, Blayac, Sylvain, Kasbari, Moustafa, Inal, Karim, Rivero, Christian
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Volume:
1052
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1052-DD03-01
Date:
January, 2007
File:
PDF, 606 KB
english, 2007
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