Process Integration and Manufacturasility Issues for High...

MRS Proceedings 1994 / 1 Vol. 337

Process Integration and Manufacturasility Issues for High Performance Multilevel Interconnect

Jeng, Shin-Puu, Havemann, Robert H., Chang, Mi-Chang
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Volume:
337
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-337-25
Date:
January, 1994
File:
PDF, 739 KB
english, 1994
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