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Defects Related to Nitrogen Implantation in Silicon Single Crystals
Bode, M., Jakubowicz, A., Habermeier, H.U.Volume:
10-12
Year:
1986
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.10-12.1147
File:
PDF, 469 KB
1986