A Process Technology for 0.16 μm Embedded DRAM with Fast Logic Speed and Small DRAM Cell
Suh, Dong Hack, Lee, JunghwanVolume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1779629
File:
PDF, 1.10 MB
english, 2004