Experimental Investigation of the Impact of Implanted...

MRS Proceedings 2008 / 1 Vol. 1070

Experimental Investigation of the Impact of Implanted Phosphorus Dose and Anneal on Dopant Diffusion and Activation in Germanium

Mazzocchi, Vincent, Koffel, Stéphane, Le Royer, Cyrille, Scheiblin, Pascal, Barnes, Jean-Paul, Hopstaken, Marco
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Volume:
1070
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1070-E01-08
Date:
January, 2008
File:
PDF, 825 KB
english, 2008
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