Growth and Characterization of the 4H-SiC Epilayers on...

Materials Science Forum 2004 Vol. 457-460

Growth and Characterization of the 4H-SiC Epilayers on Substrates with Different Off-Cut Directions

Tsuchida, Hidekazu, Kamata, Isaho, Izumi, Syunsuke, Tawara, Takeshi, Izumi, Kunikaza
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Volume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.229
File:
PDF, 2.58 MB
english, 2004
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