Dopant Diffusion in Si1-xGex Thin Films: Effect of...

Defect and Diffusion Forum 2006 Vol. 249

Dopant Diffusion in Si1-xGex Thin Films: Effect of Epitaxial Stress

Portavoce, Alain, Berbezier, Isabelle, Ronda, Antoine, Gas, Patrick, Christensen, J.S., Kuznetsov, Andrej Yu., Svensson, Bengt G.
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Volume:
249
Year:
2006
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.249.135
File:
PDF, 5.27 MB
english, 2006
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