Photolithographic Process Based on High Contrast Acrylate...

MRS Proceedings 2006 / 1 Vol. 950

Photolithographic Process Based on High Contrast Acrylate Photoresist for Multi-Protein Patterning

Chatzichristidi, Margarita, Petrou, Panagiota S., Douvas, Antonios M., Diakoumakos, Constantinos D., Raptis, Ioannis, Misiakos, Konstantinos, Kakabakos, Sotirios S., Argitis, Panagiotis
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Volume:
950
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0950-D15-15
Date:
January, 2006
File:
PDF, 518 KB
english, 2006
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