Design and Fabrication of MEMS Piezoelectric Rotational Actuators
Gee, Danny, Churaman, Wayne, Currano, Luke, Zakar, EugeneVolume:
1139
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1139-GG03-01
Date:
January, 2008
File:
PDF, 1.09 MB
english, 2008