Thermal Stability of Thin Films of Ion Beam Deposited CNx

MRS Proceedings 2003 / 1 Vol. 792

Thermal Stability of Thin Films of Ion Beam Deposited CNx

Ingram, David C., Kayani, Asghar, Lanter, William C., DeJoseph, Charles A.
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Volume:
792
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-792-R9.21
Date:
January, 2003
File:
PDF, 105 KB
english, 2003
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