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Investigation of Liquid Sensor Using a Dual-Mode Thin Film Bulk Acoustic Resonator (FBAR) Combined with Au/Cr Layers
Chang, Wei Tsai, Chen, Ying Chung, Lin, Re Ching, Kao, Kuo Sheng, Jiang, Jia Ming, Yang, Chun Hung, Cheng, Chien ChuanVolume:
201-203
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.201-203.700
Date:
February, 2011
File:
PDF, 322 KB
english, 2011