[ECS 210th ECS Meeting - Cancun, Mexico (October...

  • Main
  • [ECS 210th ECS Meeting - Cancun, Mexico...

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - ALD Options for Si-integrated Ultrahigh-density Decoupling Capacitors in Pore and Trench Designs

Roozeboom, F., Klootwijk, Johan, Verhoeven, Jan, van den Heuvel, Eric, Dekkers, Wouter, Heil, Stephan, van Hemmen, Hans, van de Sanden, Richard, Kessels, Erwin, Le Cornec, F, Guiraud, L, Chevrie, D, B
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
3
Year:
2007
Language:
english
DOI:
10.1149/1.2721486
File:
PDF, 1.10 MB
english, 2007
Conversion to is in progress
Conversion to is failed