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Study on the Surface and Subsurface Integrity of Ground Monocrystalline Silicon Wafers
Kang, Ren Ke, Zhang, Y.X., Guo, Dong Ming, Jin, Zhu JiVolume:
291-292
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.291-292.425
File:
PDF, 548 KB
english, 2005