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HRTEM Analysis of AlN Layer Grown on 3C-SiC/Si Heteroepitaxial Substrates with Various Surface Orientations
Isshiki, Toshiyuki, Nishio, Koji, Abe, Yoshihisa, Komiyama, Jun, Suzuki, Shunichi, Nakanishi, HideoVolume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.1317
File:
PDF, 3.27 MB
english, 2009