Growth of 3C-SiC on Si: Influence of Process Pressure

Materials Science Forum 2009 Vol. 600-603

Growth of 3C-SiC on Si: Influence of Process Pressure

Severino, Andrea, Frewin, Christopher L., Anzalone, Ruggero, Bongiorno, Corrado, Fiorenza, Patrick, D'Arrigo, Giuseppe, Giannazzo, Filippo, Foti, Gaetano, La Via, Francesco, Saddow, S.E.
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Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.211
File:
PDF, 3.35 MB
english, 2009
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