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Filtered pulsed cathodic arc deposition of fullerene-like carbon and carbon nitride films
Tucker, Mark D., Czigány, Zsolt, Broitman, Esteban, Näslund, Lars-Åke, Hultman, Lars, Rosen, JohannaVolume:
115
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4871179
Date:
April, 2014
File:
PDF, 2.84 MB
english, 2014