Comparative TEM Investigation of MBE and RTCVD Conversion...

Materials Science Forum 2003 Vol. 433-436

Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC

Morales, Francisco M., Molina, S.I., Araújo, Daniel, Cimalla, Volker, Pezoldt, Jörg
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Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.433-436.285
File:
PDF, 1.21 MB
english, 2003
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