High Quality GaN on Si(111) using (AlN/GaN)x Superlattice...

Materials Science Forum 2000 Vol. 338-342

High Quality GaN on Si(111) using (AlN/GaN)x Superlattice and Maskless ELO

Lahrèche, H., Bousquet, V., Laügt, M., Tottereau, Olivier, Vennéguès, P., Beaumont, B., Gibart, Pierre
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Volume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.1487
File:
PDF, 337 KB
2000
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