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A boron etch-stop assisted lateral silicon etching process for improved high-aspect-ratio silicon micromachining and its applications
Hsieh, Jerwei, Fang, WeileunVolume:
12
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/12/5/310
Date:
September, 2002
File:
PDF, 681 KB
english, 2002