![](/img/cover-not-exists.png)
langle100rangle composite beam structure formed by masked-maskless etch of silicon
Li, Xinxin, Yang, Heng, Bao, Minhang, Shen, Shaoqun, Wang, WeiyuanVolume:
9
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/9/3/307
Date:
September, 1999
File:
PDF, 296 KB
english, 1999