New Strained Silicon-on-Insulator Fabricated by...

Japanese Journal of Applied Physics 2005 / 4 Vol. 44; Iss. 4B

New Strained Silicon-on-Insulator Fabricated by Laser-Annealing Technology

Mishima, Yasuyoshi, Ochimizu, Hirohisa, Mimura, Atsushi
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Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2336
Date:
April, 2005
File:
PDF, 168 KB
english, 2005
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