Microstructure Effects in Hot-wire Deposited Undoped...

MRS Proceedings 2008 / 1 Vol. 1066

Microstructure Effects in Hot-wire Deposited Undoped Microcrystalline Silicon Films

Beyer, Wolfhard, Carius, Reinhard, Lennartz, Dorothea, Niessen, Lars, Pennartz, Frank
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Volume:
1066
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1066-A06-12
Date:
January, 2008
File:
PDF, 648 KB
english, 2008
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