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Sputtering condition effect on structure and properties of LiNbO3 films
Sumets, M., Kostyuchenko, A., Ievlev, V., Kannykin, S., Dybov, V.Volume:
26
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-015-2975-6
Date:
June, 2015
File:
PDF, 1.58 MB
english, 2015