Total SiH4/H2 pressure effect on microcrystalline silicon thin films growth and structure
E. Katsia, E. Amanatides, D. Mataras, Α. Soto, G.A. VoyiatzisVolume:
87
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.solmat.2004.07.021
File:
PDF, 262 KB
english, 2005