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Properties of Ti-Si-N Hard Coatings Prepared by Filtered Vacuum Arc Source and Magnetron Sputtering Cathode
Lee, Seunghun, Svadkovski, Igor, Kim, Jong-Kuk, Kim, Do-GeunVolume:
1159
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1159-G02-12
Date:
January, 2009
File:
PDF, 442 KB
english, 2009