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Electroless Cu Deposition on Self-assembled Monolayer Alternative Barriers
Armini, Silvia, Maestre Caro, ArantxaVolume:
1156
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1156-D04-08
Date:
January, 2009
File:
PDF, 949 KB
english, 2009