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Design of Ultra Low Temperature Pressure and Temperature Sensor Structure
Ji, Chang Hong, Zhang, Bin Zhen, Zhang, Jian, Li, Xiang Hong, Liu, Jian LinVolume:
80-81
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.80-81.693
Date:
July, 2011
File:
PDF, 284 KB
english, 2011