The optical properties of sputtered composite of Al–AlN

The optical properties of sputtered composite of Al–AlN

Shuxi Zhao, Ewa Wäckelgård
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Volume:
90
Year:
2006
Language:
english
Pages:
14
DOI:
10.1016/j.solmat.2005.11.006
File:
PDF, 365 KB
english, 2006
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