Characterization of Diverse Gate Oxides on 4H-SiC 3D...

Materials Science Forum 2013 / 1 Vol. 740-742

Characterization of Diverse Gate Oxides on 4H-SiC 3D Trench-MOS Structures

Banzhaf, Christian T., Grieb, Michael, Trautmann, Achim, Bauer, Anton J., Frey, Lothar
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Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.691
Date:
January, 2013
File:
PDF, 1.38 MB
english, 2013
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