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Effect of Substrates on the Characteristics of Silicon Carbide Deposited from Methyltrichlorosilane
Lu, Cui Ying, Yin, Xiao Wei, Li, Xiang MingVolume:
295-297
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.295-297.1422
Date:
July, 2011
File:
PDF, 2.33 MB
english, 2011