Very low surface recombination velocities on p-type silicon wafers passivated with a dielectric with fixed negative charge
G. Agostinelli, A. Delabie, P. Vitanov, Z. Alexieva, H.F.W. Dekkers, S. De Wolf, G. BeaucarneVolume:
90
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.solmat.2006.04.014
File:
PDF, 234 KB
english, 2006