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Effects of hydrogen plasma on passivation and generation of defects in multicrystalline silicon
S. Darwiche, M. Nikravech, D. Morvan, J. Amouroux, D. BallutaudVolume:
91
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.solmat.2006.08.008
File:
PDF, 247 KB
english, 2007