Formation of Ge Nanocrystals in High-k Dielectric Layers...

MRS Proceedings 2010 / 1 Vol. 1250

Formation of Ge Nanocrystals in High-k Dielectric Layers for Memory Applications

Dimitrakis, Panagiotis, Ioannou-Sougleridis, Vassilios, Normand, Pascal, Bonafos, Caroline, Schamm, Sylvie, Mouti, A, Schmidt, Bernd, Becker, Jill
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Volume:
1250
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1250-G06-04
Date:
January, 2010
File:
PDF, 718 KB
english, 2010
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