![](/img/cover-not-exists.png)
Study on an improved MWECR CVD system and preparation of silicon-substrate thin films
Xin-Hong Zhu, Guang-Hua Chen, Mao-Sheng ZhengVolume:
92
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.solmat.2008.03.023
File:
PDF, 701 KB
english, 2008