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Study on silicon-slicing technique using plasma-etching processing
Mitsutaka Yamaguchi, Yoshinori Abe, Atsushi Masuda, Michio KondoVolume:
93
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.solmat.2008.09.052
File:
PDF, 275 KB
english, 2009