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Effect of wire temperature on the microstructural evolution of Si films in hot-wire chemical vapor deposition for digital display and photovoltaic devices
Jean-Ho Song, Byung Du Ahn, Seung-Doh Shin, Nong-Moon Hwang, Hyun Jae KimVolume:
93
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.solmat.2008.11.006
File:
PDF, 1.55 MB
english, 2009