A cost-effective alkaline multicrystalline silicon surface...

A cost-effective alkaline multicrystalline silicon surface polishing solution with improved smoothness

P.K. Basu, H. Dhasmana, D. Varandani, B.R. Mehta, D.K. Thakur
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Volume:
93
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.solmat.2009.05.024
File:
PDF, 645 KB
english, 2009
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