High Rate Deposition of High Quality ZnO:Al by Filtered...

MRS Proceedings 2011 / 1 Vol. 1315

High Rate Deposition of High Quality ZnO:Al by Filtered Cathodic Arc

Mendelsberg, Rueben J., Lim, Sunnie H.N., Milliron, Delia J., Anders, André
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Volume:
1315
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.1285
Date:
January, 2011
File:
PDF, 285 KB
english, 2011
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