P Implantation Effect on Specific Contact Resistance in...

MRS Proceedings 2008 / 1 Vol. 1068

P Implantation Effect on Specific Contact Resistance in 3C-SiC Grown on Si

Bazin, Anne-Elisabeth, Michaud, Jean-François, Portail, Marc, Chassagne, Thierry, Zielinski, Marcin, Lecoq, Jean-Marc, Collard, Emmanuel, Alquier, Daniel
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Volume:
1068
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1068-C07-09
Date:
January, 2008
File:
PDF, 165 KB
english, 2008
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