[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Fabrication and Optimization of Al Doped Ta2O5 Thin Films to Enable Temperature Stable Phase Shifters
Cole, Melanie W., Nothwang, William, Hirsch, Sanual, Hubbard, Clifford, Ngo, EricVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2357194
File:
PDF, 541 KB
english, 2006