Improved Ohmic Contacts to 6H-SiC by Pulsed Laser...

Materials Science Forum 2000 Vol. 338-342

Improved Ohmic Contacts to 6H-SiC by Pulsed Laser Processing

Nakashima, Koichi, Eryu, Osamu, Ukai, S., Yoshida, K., Watanabe, Masanori
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Volume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.1005
File:
PDF, 466 KB
2000
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