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Afterglow Chemical Processing for Oxide Growth on Silicon Carbide
Hoff, Andrew M, Short, Eugene, Thomas, Helen B, Oborina, Elena IVolume:
1246
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1246-B06-03
Date:
January, 2010
File:
PDF, 178 KB
english, 2010