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MOCVD of SrTa2O6 Thin Films for High-k Applications
Regnery, Stephan, Thomas, Reji, Haselier, Hans, Ehrhart, Peter, Waser, Rainer, Lehnen, Peer, Miedl, Stefan, Schumacher, MarkusVolume:
811
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-811-D9.7
Date:
January, 2004
File:
PDF, 463 KB
english, 2004