Electrochemical method for slicing Si blocks into wafers using platinum wire electrodes
Chia-Lung Lee, Yuji Kanda, Shigeru Ikeda, Michio MatsumuraVolume:
95
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.solmat.2010.10.009
File:
PDF, 863 KB
english, 2011