Dislocation-Related Etch Protrusions Formed on 4H-SiC...

MRS Proceedings 2006 / 1 Vol. 911

Dislocation-Related Etch Protrusions Formed on 4H-SiC (000-1) Surfaces by Molten KOH Etching

Gotoh, Masahide, Tawara, Takeshi, Nakamura, Shun-ichi, Tamori, Tae, Kuboki, Yoshiyuki, Yonezawa, Yoshiyuki, Nishiura, Masaharu
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Volume:
911
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0911-B05-22
Date:
January, 2006
File:
PDF, 1.38 MB
english, 2006
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