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Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells
H. Zhu, J. Hüpkes, E. Bunte, J. Owen, S.M. HuangVolume:
95
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.solmat.2010.11.033
File:
PDF, 736 KB
english, 2011